000 00272nam a2200109Ia 4500
008 250219s9999 xx 000 0 und d
020 _a9780471232797
100 _aGary S. May
_912472
245 0 _aFundamentals of Semiconductor Fabrication
260 _bWiley
260 _c2003
999 _c5635
_d5635