| 000 | 00333nam a2200109Ia 4500 | ||
|---|---|---|---|
| 008 | 250219s9999 xx 000 0 und d | ||
| 020 | _a9780323327374 | ||
| 100 |
_aBijoy Bhattacharyya _912470 |
||
| 245 | 0 | _aElectrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology | |
| 260 | _bWilliam Andrew/ Elsevier | ||
| 260 | _c2015 | ||
| 999 |
_c5633 _d5633 |
||