000 00307nam a2200109Ia 4500
008 250219s9999 xx 000 0 und d
020 _a9780125249751
100 _aMilton Ohring
_912467
245 0 _aMaterials Science of Thin Films: Depositon and Structure
260 _bAcademic Press
260 _c2nd ed./ 2001
999 _c5630
_d5630