000 | 00323nam a2200109Ia 4500 | ||
---|---|---|---|
008 | 250110s9999 xx 000 0 und d | ||
020 | _a9781437778595 | ||
100 |
_aToshiro K. Doi _911421 |
||
245 | 0 | _aAdvances in CMP/Polishing Technologies for the Manufacture of Electronic Devices | |
260 | _bWilliam Andrew | ||
260 | _c2011 | ||
999 |
_c4778 _d4778 |