000 00323nam a2200109Ia 4500
008 250110s9999 xx 000 0 und d
020 _a9781437778595
100 _aToshiro K. Doi
_911421
245 0 _aAdvances in CMP/Polishing Technologies for the Manufacture of Electronic Devices
260 _bWilliam Andrew
260 _c2011
999 _c4778
_d4778