000 00275nam a2200109Ia 4500
008 241121s9999 xx 000 0 und d
020 _a9780470466346
100 _aKi Bang Lee
_910770
245 0 _aPrinciples of Microelectromechanical Systems
260 _bWiley
260 _c2011
999 _c4135
_d4135