| 000 | 00501 a2200169 4500 | ||
|---|---|---|---|
| 999 |
_c1685 _d1685 |
||
| 005 | 20211020111920.0 | ||
| 008 | 201009b ||||| |||| 00| 0 eng d | ||
| 020 | _a9781315274164 | ||
| 041 | _aeng | ||
| 100 |
_aMadou, Marc J. _94369 |
||
| 245 | _aFundamentals of microfabrication and nanotechnology (eBook) | ||
| 250 | _a3rd ed. | ||
| 260 |
_bTaylor & Francis _c2018 _aBoca Raton |
||
| 650 |
_aNanoelectromechanical systems. _94370 |
||
| 856 | _uhttps://doi.org/10.1201/9781315274164 | ||
| 942 | _cEBK | ||