| 000 | 00495 a2200181 4500 | ||
|---|---|---|---|
| 999 |
_c1659 _d1659 |
||
| 005 | 20211020103944.0 | ||
| 008 | 200918b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780306476013 | ||
| 041 | _aeng | ||
| 100 |
_aSenturia, Stephen D. _94275 |
||
| 245 | _aMicrosystem design (eBook) | ||
| 250 | _a2nd ed. | ||
| 260 |
_bSpringer _c2001 _aBoston |
||
| 650 |
_aTransducer _94276 |
||
| 650 |
_aMicroelectromechanical system (MEMS) _94277 |
||
| 856 | _uhttps://doi.org/10.1007/b117574 | ||
| 942 | _cEBK | ||