TY  - GEN
AU  - Gao, Wei
TI  - Surface metrology for micro- and nanofabrication
SN  -  9780128178508
U1  - 620.50287 GAO/S 
PY  - 2021///
CY  - Amsterdam
PB  - Elsevier
KW  - Nanofabrication
KW  - Fabrication
KW  - Nanomanufacturing
KW  - Nanostructured materials--Measurement
ER  -