TY  - GEN
AU  - Thomas, Sabu (Editor)
AU  - Balakrishnan, Preetha (Editor)
TI  - Nanoscale processing
SN  -  9780128205693
U1  - 620.115 THO/N 
PY  - 2021///
CY  - Amsterdam
PB  - Elsevier
KW  - Fabrication
KW  - Manufacturing processes
ER  -