TY  - GEN
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication and nanotechnology (eBook)
SN  - 9781315274164
PY  - 2018///
CY  - Boca Raton
PB  - Taylor & Francis
KW  - Nanoelectromechanical systems
UR  - https://doi.org/10.1201/9781315274164
ER  -