Madou, Marc J. <br/><br/>
Fundamentals of microfabrication and nanotechnology (eBook) 

 - 3rd ed. 
 - Boca Raton  Taylor & Francis  2018  
<br/><br/><label>ISBN: </label>9781315274164 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanoelectromechanical systems.