TY  - GEN
AU  - Senturia, Stephen D. 
TI  - Microsystem design (eBook)
SN  - 9780306476013
PY  - 2001///
CY  - Boston
PB  - Springer
KW  - Transducer
KW  - Microelectromechanical system (MEMS)
UR  - https://doi.org/10.1007/b117574
ER  -