Senturia, Stephen D.  <br/><br/>
Microsystem design (eBook) 

 - 2nd ed. 
 - Boston  Springer  2001 
<br/><br/><label>ISBN: </label>9780306476013 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Transducer<br/>Microelectromechanical system (MEMS)