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Fundamentals of microfabrication and nanotechnology (eBook)

By: Madou, Marc J
Language: English Publisher: Boca Raton Taylor & Francis 2018Edition: 3rd edISBN: 9781315274164Subject(s): Nanoelectromechanical systemsOnline resources: Publisher's URL
Item type Current location Collection Call number Status Date due Barcode
EBook EBook Central Library
Online 		EBook Available EB00056

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