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Fundamentals of Semiconductor Fabrication (Record no. 5635)

000 -LEADER
fixed length control field 00272nam a2200109Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 250219s9999 xx 000 0 und d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780471232797
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Gary S. May
9 (RLIN) 12472
245 #0 - TITLE STATEMENT
Title Fundamentals of Semiconductor Fabrication
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Name of publisher, distributor, etc. Wiley
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Date of publication, distribution, etc. 2003

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