Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology (Record no. 5633)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00333nam a2200109Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 250219s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780323327374 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Bijoy Bhattacharyya |
| 9 (RLIN) | 12470 |
| 245 #0 - TITLE STATEMENT | |
| Title | Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Name of publisher, distributor, etc. | William Andrew/ Elsevier |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Date of publication, distribution, etc. | 2015 |
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