| 000 -LEADER |
|---|
| fixed length control field |
00501 a2200169 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20211020111920.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
201009b ||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| ISBN |
9781315274164 |
| 041 ## - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
eng |
| 100 ## - MAIN ENTRY--AUTHOR NAME |
|---|
| Personal name |
Madou, Marc J. |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Fundamentals of microfabrication and nanotechnology (eBook) |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
3rd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Name of publisher |
Taylor & Francis |
| Year of publication |
2018 |
| Place of publication |
Boca Raton |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Nanoelectromechanical systems. |
| 856 ## - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
https://doi.org/10.1201/9781315274164 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
EBook |
