Madou, Marc J.
Fundamentals of microfabrication and nanotechnology (eBook) - 3rd ed. - Boca Raton Taylor & Francis 2018
9781315274164
Nanoelectromechanical systems.
Fundamentals of microfabrication and nanotechnology (eBook) - 3rd ed. - Boca Raton Taylor & Francis 2018
9781315274164
Nanoelectromechanical systems.