Senturia, Stephen D.
Microsystem design (eBook) - 2nd ed. - Boston Springer 2001
9780306476013
Transducer
Microelectromechanical system (MEMS)
Microsystem design (eBook) - 2nd ed. - Boston Springer 2001
9780306476013
Transducer
Microelectromechanical system (MEMS)